造芯片关键技术有哪些？ - 知乎
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另外还有一些别人翻译的，对半导体制造工艺进行详细讲解的。 你可以看看。 另外就是芯片制造工艺分为FEOL、MOL和BEOL，前道工序、中道工序和后道工序，你可以参考一下《集成电路产业全书》，里面有非常详细的介绍。
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