在 CMOS 工艺过程中,通常按照工艺模块分为前道工艺(front end of line,FEOL)、中道工艺(middle of line,MOL)和后道工艺(back end of line,BEOL)。前道工艺包括制造有源区、阱区、栅极、源极和漏极等;后道工艺包括制造金属互连线及金属通孔,目前的先进节点(0.18μm 及更先进节点)大多选用铜作为 ...
知乎盐选 | 1.2 集成电路制造流程
在 CMOS 工艺过程中,通常按照工艺模块分为前道工艺(front end of line,FEOL)、中道工艺(middle of line,MOL)和后道工艺(back end of line,BEOL)。前道工艺包括制造有源区、阱区、栅极、源极和漏极等;后道工艺包括制造金属互连线及金属通孔,目前的先进节点(0.18μm 及更先进节点)大多选用铜作为 ...
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