半导体器件失效分析手法中,OBRICH 、Thermal、EMMI 分别是什么? - 知乎
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Thermal测试机台,分为制冷型和非制冷型两种。 制冷型Thermal通常收集3~5µm的短波红外,非制冷型Thermal通常收集8~14µm长波红外。 所以通过半波长我们可以推算出,制冷红外高倍物镜下的极限分辨率约为2µm;非制冷红外物镜的极限分辨率约为5µm。
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