XPS (X-Ray Photoelectron Spectroscopy) 和 EDS (Energy ... - 知乎
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EDS可以达到很高的空间分辨率（1 nm以下），但是能量分辨率一般都在100 eV以上。 EDS通常也不能检测原子序数很低的元素（一般用来检测铝Al以上的元素），因为轻元素对应的X射线能量较低，而在低能区探测器的吸收背景干扰比较大。
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