芯片制造过程中的 控片,dummy片和season片的区别和作用分别是什么? - 知乎

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广义的dummy是指所有不用做生产产品但又要进机台跑一遍的wafer,season是机台的一个过程,暖机,就是很多时候机台的状态偏离了生产状态(比如因为PM而断电停机),需要让机台空跑一段时间来让它稳定,这个过程叫season,但可能机台不能空腔直接跑,需要放进去wafer,这时候用的wafer就是season片。


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