半导体track与scanner区别 - 百度知道
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半导体track与scanner区别是精密程度。 1、Track把光刻胶涂附到芯片上就等同于底片，而曝光机就是一台最高级的照相机。 2、scanner即光线被限制在一条缝的区域内，光刻时，掩膜版和晶圆同时运动，使光线以扫描的方式扫过一个die的区域，从而将电路图案刻在晶圆上。
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